Wafer Chuck Reconditioning
Wafer chuck reconditioning now available in the Silicon Valley area.
- Vacuum chucks of all sizes and design
- Dicing chucks
- Flat panel display chucks
- Chucks with porous inserts
- Reference chucks flat to 1/4 light band
- Chucks for cleaning
- Chucks for doping
- Chucks for polishing
- Low contact wafer chucks
- Pin chucks
- Ring chucks
Flatness to 1000 Å
Parallelism to 1 micron
No size limitation
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